In the semiconductor industry, the choice of coating technology is an important factor affecting product quality and performance. Today, we will introduce FFE technology to everyone.
FFE technology was developed by GENCOA in the UK, which uses its internally rotatable magnetic field as its core to significantly improve the low utilization rate and poor uniformity of circular planar cathode targets.
The core advantages of FFE technology lie in its high uniformity and high utilization rate of target materials. Through an internally rotatable magnetic field, FFE technology can achieve uniformity control during the coating process.
Its uniformity can reach better than ± 3%, and the utilization rate of the target material also exceeds 40%.
In addition to its core advantages, FFE technology also has multiple ways to adjust uniformity.
For example, by changing the rotational speed of the magnet array (50-120 rpm), the uniformity during the coating process can be adjusted.
In addition, adjusting the position of the magnet relative to the axis of rotation and using magnetic plates to adjust the magnetic field are also commonly used uniformity adjustment methods in FFE technology.
The diversity of these adjustment methods enables FFE technology to adapt to different coating requirements, improving product quality and performance.
FFE technology is also very suitable for semiconductor wafer coating, with a high degree of fit between the uniform area and the circular substrate, making the coating process more precise and efficient.
In addition, the cathode target material size of FFE technology is diverse, with 3-8 inches and 10-17 inches to choose from, which can meet the coating requirements of wafers of different sizes.
Besides the semiconductor industry, FFE technology also has a wide range of applications in other fields.
For example, in the fields of optics, electronics, aerospace, etc., FFE technology can be considered for products with high requirements for coating quality and uniformity.
FFE technology also has the characteristics of long magnet life, adjustable rotation speed, high power capacity, and direct cooling of target materials.
These characteristics make FFE technology more stable and reliable during the coating process. Meanwhile, its gas pressure control and vacuum water seal design also ensure the accuracy and safety of the coating process.
The following are measurements of uniformity and target utilization during the entire life cycle of the target material, operating at different kW · h (target material is Cu (C101), power is 5 kW DC, gas is Ar, pressure is 5.9 E-3 mbar)
