Vacuum technology is a fundamental science and technology with wide applications in various industries, such as semiconductor manufacturing, aerospace, solar photovoltaics, vacuum coating, and so on.
At present, the vacuum measurement equipment in the industry generally uses relative vacuum degree in rough vacuum environment or positive pressure environment, while absolute vacuum degree is generally used in high vacuum and ultra-high vacuum environment
1. Vacuum
The state of a gas below atmospheric pressure in a given space is a physical phenomenon.
2. Vacuum degree
The degree of gas rarefaction in a vacuum state is usually represented by "high vacuum degree" and "low vacuum degree".
High vacuum degree means "good" vacuum degree, while low vacuum degree means "poor" vacuum degree.
3. Extreme vacuum
After sufficient pumping, the vacuum container stabilizes at a certain degree of vacuum, which is called the ultimate vacuum.
Usually, a vacuum container needs to undergo 12 hours of gas refining, followed by 12 hours of vacuum pumping. In the last hour, measurements are taken every 10 minutes, and the average of the 10 measurements is taken as the ultimate vacuum value.
