InPower Oil free screw vacuum pump is through driving & driven rotor rotating to enlarge the sealed suction section to inhale gas . After the pumped gas enter into pump chamber, the sealed section will move from suction end to discharge end along with the driving & driven rotor rotation, pressure rises steadily and there is no intermediate exhaust phenomenon.When sealed space is connected to discharge port, the gas in the discharge passage is backlash into the pump chamber, causing the gas pressure and temperature in the pump chamber rising, and producing airflow noise.With the pump continues working,volume of sealed space begins to become smaller and smaller and the gas in the pump chamber is continuously discharged.There is free-oil lubrication for pump chamber . So it can get a clean vacuum. Anti-corrosion should be done when screw vacuum pump suck corrosive gases.
Features:
More complex rotor structure, higher precision requirements,more difficult rotor processing and longer processing time;At the same time ,variable lead screw vacuum pump with smaller running power,lower noise as well as lower temperature of pump running.
inPower Oil free screw vacuum pump Technical parameters:
Model：LGB30/50/70/110/150/180/200/220/270/300/360/400/500
Ultimate vacuum: ≤1Pa
SPEED 50 Hz:30～500 L/s
SPEED 60 Hz:36 - 600 L/s
Model | LGB30 | LGB50 | LGB70 | LGB110 | LGB150 | LGB180 | LGB200 | LGB220 | LGB270 | LGB300 | LGB360 | LGB400 | LGB500 | ||
SPEED(50Hz) | L/s | 30 | 50 | 83 | 110 | 150 | 180 | 200 | 230 | 270 | 300 | 360 | 360 | 500 | |
m3/h | 110 | 180 | 300 | 400 | 540 | 650 | 720 | 830 | 970 | 1080 | 1300 | 1500 | 1800 | ||
Ultimate Vacuum (50Hz) | Pa | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | 5 | |
Maximum exhaust pressure | bar | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.5 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | 1.2 | |
POWER(50Hz) | Kw | 4 | 4 | 5.5/7.5 | 11 | 15 | 15 | 18.5 | 18.5 | 22 | 30 | 37 | 37 | 37 | |
Motor Speed(50Hz) | rpm | 2880 | 2880 | 2880 | 2880 | 2880 | 2880 | 2880 | 2880 | 2880 | 2880 | 2880 | 2880 | 2880 | |
Connect | IN | mm | 50 | 50 | 65 | 65 | 100 | 100 | 150 | 150 | 150 | 150 | 150 | 150 | 150 |
OUT | mm | 40 | 40 | 65 | 65 | 80 | 80 | 100 | 100 | 100 | 100 | 100 | 100 | 100 | |
Water | Flow | L/min | 6 | 6 | 10 | 15 | 20 | 20 | 25 | 25 | 28 | 28 | 28 | 28 | 28 |
Pressure | MPa | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | 0.2～0.35 | |
Connect | G3/8" | G1/2" | G1/2" | G1/2" | G1/2" | G1/2" | G1/2" | G1/2" | G1/2" | G1/2" | G1/2" | G1/2" | G1/2" | ||
Cooling Method | Air/Water | Air/Water | Water | Water | Water | Water | Water | Water | Water | Water | Water | Water | Water | Water | |
Noise | dB | 75 | 75 | 75 | 76 | 76 | 78 | 78 | 78 | 80 | 80 | 85 | 85 | 85 | |
Weight | Kg | 310 | 310 | 475 | 570 | 840 | 840 | 1200 | 1220 | 1250 | 1300 | 1350 | 1380 | 1400 | |
Special Requirements | According to requirements, it can be configured with variable frequency, anti-corrosion, explosion-proof, etc | ||||||||||||||
It is ideally suited for most application with specific variants tailored for the chemical and industrial markets, with a particular focus on the fine chemical and pharmaceutical markets.
Production situation：
inPower LGB Oil free screw vacuum pump Application area:
Metrology and Inspection Equipment:
Vacuum systems in metrology and inspection tools used in semiconductor fabrication require reliable pumps to evacuate chambers and ensure accurate measurements. Dry screw pumps provide the necessary vacuum performance for these applications.
Ion Implantation:
Dry screw pumps are essential for creating and maintaining the high vacuum levels needed in ion implantation equipment, which is used to introduce dopant atoms into semiconductor materials to modify their electrical properties.
Photolithography:
In the photolithography process, dry screw pumps help evacuate the exposure tool chamber, ensuring the precise transfer of patterns onto semiconductor wafers during the semiconductor fabrication process.
Research and Development:
Dry screw pumps are also used in research and development laboratories within the semiconductor industry for testing new processes, materials, and equipment under controlled vacuum conditions.
