China Customized Auxiliary Vacuum Pump Manufacturers Suppliers Factory

Inpower auxiliary vacuum pump is often used in combination with other types of vacuum pumps, such as rotary vane pumps or oil-sealed pumps, to create a more powerful and reliable vacuum system for industrial processes.

Model:R30/70/150/300/400/600/900/1200/2500/5000/10000

Ultimate vacuum:≤0.01Pa

SPEED 50Hz: 30-10000 L/s

SPEED 60Hz: 36-12000 L/s

Technical Parameter：

Model			R30	R70	R150	R300		R600	R1200	R2500
Pumping Speed(50Hz)		L/s	41	83	166	360		600	1200	2500
Ultimate Vacuum(50Hz)		Pa	5*10^-2	5*10^-2	5*10^-2	5*10^-2		5*10^-2	5*10^-2	5*10^-2
Maximum Differential Pressure		Pa	6700	6700	6700	5500		5500	4000	4000
Pressure Difference Of Overflow Valve (Optional)		Pa	8000	8000	8000	8000		8000	8000	8000
Power(50Hz)		Kw	1.1	1.1	2.2	4		7.5	11	18.5
Power Speed(50Hz)		rpm	1440	2880	2880	2880		2880	2880	2880
Connect	Inlet Diameter	mm	80	80	100	150		200	250	320
Connect	Outet Diameter	mm	80	80	100	150		200	250	320
Cooling Method		Air/Water	Air	Air	Water		Water	Water	Water	Water
Weight		Kg	80	110	200	270		580	780	1400
Optional Requirements		Optional options include variable frequency,anti-corrosion, explosion-proof, etc. according to requirements

Characteristic：

Supporting Role: The auxiliary roots vacuum pump works in conjunction with the main roots pump to create and maintain the desired vacuum level in the system. It helps to evacuate the gas molecules that are discharged by the roots pump, ensuring efficient operation.

Oil-Sealed or Dry Operation: Depending on the specific model, auxiliary roots vacuum pumps may operate using oil-sealed mechanisms or as dry pumps. Oil-sealed pumps offer effective sealing and lubrication, while dry pumps eliminate the risk of oil contamination in sensitive processes.

Compact Design: Auxiliary roots vacuum pumps are often compact and lightweight, making them easy to install and integrate into existing vacuum systems. Their compact size enables flexibility in system layout and configuration.

Reliability:

Just like the main roots pump, auxiliary roots vacuum pumps are engineered for reliability and durability. They are built to withstand continuous operation and provide consistent performance over extended periods.

product-733-431

Inpower auxiliary vacuum pump application ：

Vacuum Coating: Multi-stage roots pumps are widely used in vacuum coating processes such as physical vapor deposition (PVD) and chemical vapor deposition (CVD) for depositing thin films on substrates with precision and uniformity.

Semiconductor Manufacturing: In semiconductor fabrication facilities, multi-stage roots pumps play a critical role in creating and maintaining the ultra-high vacuum conditions required for processes like ion implantation, plasma etching, and wafer inspection.

Analytical Instruments: High-performance analytical instruments such as mass spectrometers, electron microscopes, and surface analysis tools benefit from the use of multi-stage roots pumps to achieve the low base pressures necessary for accurate measurements and analysis.