Inpower multi stage roots pump is often used in combination with other types of vacuum pumps, such as rotary vane pumps or oil-sealed pumps, to create a more powerful and reliable vacuum system for industrial processes.
Technical Parameter:
|
Model |
R30 |
R70 |
R150 |
R300 |
R600 |
R1200 |
R2500 |
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|
Pumping Speed(50Hz) |
L/s |
41 |
83 |
166 |
360 |
600 |
1200 |
2500 |
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|
Ultimate Vacuum(50Hz) |
Pa |
5*10-2 |
5*10-2 |
5*10-2 |
5*10-2 |
5*10-2 |
5*10-2 |
5*10-2 |
||
|
Maximum Differential Pressure |
Pa |
6700 |
6700 |
6700 |
5500 |
5500 |
4000 |
4000 |
||
|
Pressure Difference Of Overflow Valve (Optional) |
Pa |
8000 |
8000 |
8000 |
8000 |
8000 |
8000 |
8000 |
||
|
Power(50Hz) |
Kw |
1.1 |
1.1 |
2.2 |
4 |
7.5 |
11 |
18.5 |
||
|
Power Speed(50Hz) |
rpm |
1440 |
2880 |
2880 |
2880 |
2880 |
2880 |
2880 |
||
|
Connect |
Inlet Diameter |
mm |
80 |
80 |
100 |
150 |
200 |
250 |
320 |
|
|
Outet Diameter |
mm |
80 |
80 |
100 |
150 |
200 |
250 |
320 |
||
|
Cooling Method |
Air/Water |
Air |
Air |
Water |
Water |
Water |
Water |
Water |
||
|
Weight |
Kg |
80 |
110 |
200 |
270 |
580 |
780 |
1400 |
||
|
Optional Requirements |
Optional options include variable frequency,anti-corrosion, explosion-proof, etc. according to requirements |
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Characteristic:
Low Noise Levels:
Some models of roots vacuum booster pumps are designed to operate quietly, which can be advantageous in environments where noise levels need to be minimized.
Reliability:
Mechanical roots vacuum booster pumps are generally robust and reliable, with a long service life when properly maintained. They can withstand harsh operating conditions and provide consistent performance over time.
Low Vibration:
Many auxiliary roots vacuum pumps are designed to operate with minimal vibration, reducing noise levels and ensuring stable performance in industrial environments.
Compatibility:
Auxiliary roots vacuum pumps are designed to be compatible with various types of primary vacuum pumps, including roots pumps, turbomolecular pumps, and others. This compatibility allows for flexibility in system design and configuration.
High Pumping Speed:
Similar to the main roots pump, the auxiliary pump typically has a high pumping speed to facilitate the evacuation of gas from the system at a rapid rate.
Inpower multi stage roots pump application :
Semiconductor Manufacturing:
In semiconductor fabrication processes, where high vacuum levels are required to ensure the quality and precision of semiconductor devices, auxiliary roots vacuum pumps support the main vacuum pumps to achieve and maintain the necessary vacuum conditions.
Thin Film Deposition:
In thin film deposition techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD), auxiliary roots vacuum pumps help create and sustain the vacuum environment needed for depositing thin films onto substrates accurately.
Vacuum Furnaces:
Vacuum furnaces used for heat treatment, sintering, and other high-temperature processes rely on auxiliary roots vacuum pumps to establish the low-pressure environment necessary for these operations.
Research Laboratories:
Multi-stage roots pumps are employed in research institutions and laboratories for experiments, material processing, and testing that demand precise control over vacuum levels and contamination-free environments.
Vacuum Furnaces and Heat Treatment:
Industries utilizing vacuum furnaces for heat treatment, brazing, sintering, and other thermal processes rely on multi-stage roots pumps to create and maintain high vacuum conditions within the furnace chamber.
Thin Film Deposition:
Multi-stage roots pumps are integral to thin film deposition techniques in industries such as optics, electronics, and aerospace, where uniform and defect-free coatings are critical for product performance.

