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Multi Stage Roots Pump

Inpower multi stage roots pump is often used in combination with other types of vacuum pumps, such as rotary vane pumps or oil-sealed pumps, to create a more powerful and reliable vacuum system for industrial processes.
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Product Introduction

Inpower multi stage roots pump is often used in combination with other types of vacuum pumps, such as rotary vane pumps or oil-sealed pumps, to create a more powerful and reliable vacuum system for industrial processes.

 

Technical Parameter:

Model

R30

R70

R150

R300

R600

R1200

R2500

Pumping Speed(50Hz)

L/s

41

83

166

360

600

1200

2500

Ultimate Vacuum(50Hz)

Pa

5*10-2

5*10-2

5*10-2

5*10-2

5*10-2

5*10-2

5*10-2

Maximum Differential Pressure

Pa

6700

6700

6700

5500

5500

4000

4000

Pressure Difference Of Overflow Valve (Optional)

Pa

8000

8000

8000

8000

8000

8000

8000

Power(50Hz)

Kw

1.1

1.1

2.2

4

7.5

11

18.5

Power Speed(50Hz)

rpm

1440

2880

2880

2880

2880

2880

2880

 

Connect

Inlet Diameter

mm

80

80

100

150

200

250

320

Outet Diameter

mm

80

80

100

150

200

250

320

Cooling Method

Air/Water

Air

Air

Water

Water

Water

Water

Water

Weight

Kg

80

110

200

270

580

780

1400

Optional Requirements

Optional options include variable frequency,anti-corrosion, explosion-proof, etc. according to requirements

 

Characteristic:

 

Low Noise Levels:

Some models of roots vacuum booster pumps are designed to operate quietly, which can be advantageous in environments where noise levels need to be minimized.

 

Reliability:

Mechanical roots vacuum booster pumps are generally robust and reliable, with a long service life when properly maintained. They can withstand harsh operating conditions and provide consistent performance over time.

 

Low Vibration:

Many auxiliary roots vacuum pumps are designed to operate with minimal vibration, reducing noise levels and ensuring stable performance in industrial environments.

 

Compatibility:

Auxiliary roots vacuum pumps are designed to be compatible with various types of primary vacuum pumps, including roots pumps, turbomolecular pumps, and others. This compatibility allows for flexibility in system design and configuration.

 

High Pumping Speed:

Similar to the main roots pump, the auxiliary pump typically has a high pumping speed to facilitate the evacuation of gas from the system at a rapid rate.

 

Inpower multi stage roots pump application :

 

Semiconductor Manufacturing:

In semiconductor fabrication processes, where high vacuum levels are required to ensure the quality and precision of semiconductor devices, auxiliary roots vacuum pumps support the main vacuum pumps to achieve and maintain the necessary vacuum conditions.

 

Thin Film Deposition:

In thin film deposition techniques such as physical vapor deposition (PVD) and chemical vapor deposition (CVD), auxiliary roots vacuum pumps help create and sustain the vacuum environment needed for depositing thin films onto substrates accurately.

 

Vacuum Furnaces:

Vacuum furnaces used for heat treatment, sintering, and other high-temperature processes rely on auxiliary roots vacuum pumps to establish the low-pressure environment necessary for these operations.

 

Research Laboratories:

Multi-stage roots pumps are employed in research institutions and laboratories for experiments, material processing, and testing that demand precise control over vacuum levels and contamination-free environments.

 

Vacuum Furnaces and Heat Treatment:

Industries utilizing vacuum furnaces for heat treatment, brazing, sintering, and other thermal processes rely on multi-stage roots pumps to create and maintain high vacuum conditions within the furnace chamber.

 

Thin Film Deposition:

Multi-stage roots pumps are integral to thin film deposition techniques in industries such as optics, electronics, and aerospace, where uniform and defect-free coatings are critical for product performance.

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